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KMID : 1151820100040030027
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Journal of the Korean Society of Radiology
2010 Volume.4 No. 3 p.27 ~ p.31
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Design and Fabrication of Hard X-ray Zone Plate
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Chon Kwon-Su
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Abstract
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Spatial resolution is determined by the performance of x-ray optics used in the x-ray imaging system. A zone plate was designed for obtaining a high spatial resolution image at x-ray energy of 8.5keV. A spatial resolution of 80 nm was estimated by the ray tracing when an x-ray tube of tungsten targe was used instead of synchrotron radiation. The designed zone plate of outermost zone width of 40nm was successfully fabricated by the electron-beam lithography.
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KEYWORD
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Hard x-ray, Zone plate, Spatial resolution, Electron-beam lithography
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